JPS6243359U - - Google Patents

Info

Publication number
JPS6243359U
JPS6243359U JP1985135241U JP13524185U JPS6243359U JP S6243359 U JPS6243359 U JP S6243359U JP 1985135241 U JP1985135241 U JP 1985135241U JP 13524185 U JP13524185 U JP 13524185U JP S6243359 U JPS6243359 U JP S6243359U
Authority
JP
Japan
Prior art keywords
pellicle
adhesive layer
support frame
flexible sheet
blister
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985135241U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0123138Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985135241U priority Critical patent/JPH0123138Y2/ja
Publication of JPS6243359U publication Critical patent/JPS6243359U/ja
Application granted granted Critical
Publication of JPH0123138Y2 publication Critical patent/JPH0123138Y2/ja
Expired legal-status Critical Current

Links

JP1985135241U 1985-09-04 1985-09-04 Expired JPH0123138Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985135241U JPH0123138Y2 (en]) 1985-09-04 1985-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985135241U JPH0123138Y2 (en]) 1985-09-04 1985-09-04

Publications (2)

Publication Number Publication Date
JPS6243359U true JPS6243359U (en]) 1987-03-16
JPH0123138Y2 JPH0123138Y2 (en]) 1989-07-17

Family

ID=31037239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985135241U Expired JPH0123138Y2 (en]) 1985-09-04 1985-09-04

Country Status (1)

Country Link
JP (1) JPH0123138Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01120148U (en]) * 1988-02-09 1989-08-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01120148U (en]) * 1988-02-09 1989-08-15

Also Published As

Publication number Publication date
JPH0123138Y2 (en]) 1989-07-17

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